00323nam a2200133Ia 4500008004100000020001600041041001200057082001600069100001600085245004700101260002500148300000800173650000800181221030s9999 xx 000 0 und d a00711002820 aEnglish a105.23bRus aW. S. Ruska 0aMicroelectronic Processingcby W. S. Ruska bTMHaNew Delhic1988 a430 aECE