00353nam a2200133Ia 4500008004100000020001600041041001200057082001600069100001600085245006400101260002500165300000800190650002100198221030s9999    xx            000 0 und d  a00711002820  aEnglish  a105.23bRus  aW. S. Ruska 0aMicroelectronic Processing ( DEPARTMENTAL )cby W. S. Ruska  bTMHaNew Delhic1988  a430  aECE Departmental