00308nam a2200121Ia 4500008004100000041001200041082001100053100001700064245006200081260002700143300000800170650000800178221030s9999 xx 000 0 und d aEnglish a105.23 aG. Yepifanov 0aPhysical Principles of Micro Electronicscby G. Yepifanov bMIR Pub.aMoscowc1974 a317 aECE